EFEM (Equipment, Front End, Module)
for Semiconductor Wafer Handling 

Measured and documented specifications :  

Speed:  228 WPH (Wafers Per Hour - full cycles, null pipeline)   

Placement Repeatability:  ±25um (50um x 50um box) 

Reliability:  1,600,000 MWBF (Mean Wafer cycles Between Failure)  

New high records set for serviceability, manufacturability, and uptime measurements 

Technical paper: "Finessed Robotic Pick & Place Technique Reduces Contamination"